被测件最大长度

Max. testpiece length

150 mm

工作台行程Travel of spindle

5 mm

分度值调整范围

Adjusting range of division

0.05-0.2 µm

推荐使用分度值

Recommended division

0.1 µm

测量压力Measuring force

(1.5±0.1) N

仪器示值稳定性

Instability of indication

0.02 µm

仪器误差

Indication error

±(0.03+3ni∆λ) µm

n 是格数, i是格值, ∆λ是滤光片波长误差，

n is number of divisions, i is division value

∆λ is error of wavelength

仪器体积Dimensions

280x500x700 mm

仪器重量Weight

40 kg

标准配件

Standard attachments

五筋园台Five-Rib circular stage,

九筋玛瑙台Agate stage,

可调园平台Adjustable planar stage

辅助台Auxiliary stage, fixed

平面测帽Planar contact tip, Ф2

小球面测帽Small spherical contact tip

干涉滤光片 Wavelength filter